Plasma production of ultra-fine ceramic carbides

ABSTRACT

An apparatus and method for the synthesis of ultra-free (submicron) ceramic carbides in a thermal plasma torch reactor using primarily silica, boron oxide, titanium dioxide or other oxides as metal sources and methane as a reductant. A plasma torch operated with both argon and helium as plasma gases and having methane as a primary carrier gas is connected to the plasma reactor for providing the heat necessary to carry out the reaction. A collection chamber with both interior and exterior cooling is connected to the reactor for quenching of the reactants. Cooling is provided to the torch, the reactor and the collection using coils, baffles and jackets.

RELATED APPLICATIONS

This is a continuation of U.S. application Ser. No. 07/658,649 filed Feb. 22, 1991, now abandoned, the contents of which are incorporated herein by reference.

TECHNICAL FIELD OF THE INVENTION

This invention relates to a method and apparatus for the production of ceramic carbides to be used in the development and manufacturing of high value materials. The method and apparatus comprise a plasma torch, a reaction chamber and a rapid quenching chamber.

BACKGROUND OF THE INVENTION

The relatively new trend in silicon carbide formation is to make it by thermal plasma processes. The high temperatures available in the plasma increase the reaction kinetics by several orders of magnitude and fast quenching rates produce very small particles at high conversion rates, thus providing a number of advantages over older methods for producing very fine, submicron powders of SiC. The gas phase synthesis conducted in a pure and controlled atmosphere at a high temperature gives the powder which is produced properties which are very desirable in subsequent fabrication. These properties include high sphericity, a small diameter and a narrow size distribution.

Plasma processing has a wide range of potential applications, ranging from coating of thin layers on substrates to the destruction of toxic wastes. One of the many promising areas of plasma processing is the production of ultra-fine (submicron size) powders of high-value materials (such as carbides and nitrides). Powders produced in a pure and controlled atmosphere may be essential for subsequent fabrication of advanced materials. Silicon carbide has many eminent properties, such as: high refractoriness, high oxidation resistance and high hardness. It also has a thermal conductivity comparable to the metals, and its thermal expansion coefficient is relatively low compared with other ceramics. Because of these properties, silicon carbide can be effectively used for high temperature mechanical applications. The products obtained by the present invention can be employed for those purposes for which ceramic carbides are presently used.

A fundamental prerequisite for producing such structural ceramics depends on the availability of relatively inexpensive, high purity, reproducibly-sinterable SiC powders. One of the more important problems in the application of SiC is its poor sinterability, which is due to strong covalent bonds between molecules. In order to enhance sintering characteristics, the silicon carbide powder must have a uniform particle size distribution and a submicron mean particle size.

There have been a number of investigations concerning the production of SiC powder in plasma reactors. In most of the investigations, the reactants used (e.g., silane) are quite expensive. These reactants are used because they are easily vaporized and therefore easily convened. Silicon carbide has been produced using expensive reactants, such as silica and hydrocarbons, with an RF plasma. However, RF plasmas may present a thermal efficiency problem when scaled up to an industrial size.

Many investigators have studied and analyzed the mechanism and kinetics of silicon carbide formation in the silica-carbon system. They have proposed different intermediate species during the reaction, which vary over the temperature range used. The overall reaction between silica and carbon, which is endothenic, may be written as:

    SiO.sub.2 (s)+3C(s)=SiC(s)+2CO(g)

This reaction, as written, is very slow even under plasma reactor conditions; so the reaction rates must be increased by the formation of gaseous intermediaries. In this invention, the reactants for the SiC formation are silica and methane. When silica is exposed to high temperature (>2839° C.), it disassociates into silicon monoxide and oxygen, i.e.

    SiO.sub.2 (s)=SiO(g)+O(g)

H. L. Schick, "A Thermodynamic Analysis of the High-Temperature Vaporization Properties Silica," Chem. rev. (1960), gave a detailed thermodynamic analysis of the high temperature vaporization properties of silica. D. M. Caldwell, "A Thermodynamic Analysis of the Reduction of Silicon Oxides Using a Plasma," High Temperature Science, (1976), presented a computer model for the silicon-oxygen-carbon system. He showed that a threshold temperature exists, at approximately 2400° K., for the maximum yield of silicon and silicon carbide.

When methane is exposed to high temperature, it decomposes into different species depending upon the temperature. The important reactions for the methane decomposition are as follows:

    2CH.sub.4 (g)=C.sub.2 H.sub.2 (g)+3H.sub.2 (g)

    2CH.sub.4 (g)=2C(s)+4H.sub.2 (g)

    2CH.sub.4 (g)=C.sub.2 H(g)+3.5H.sub.2 (g)

The formation of acetylene by the thermal decomposition of methane is explained by the theory of free radicals and has been observed by a number of investigators, including the work reported here. The primary species formed when methane is exposed to high temperatures are: H₂, C₂ H₂, C₂ H and C.

SUMMARY OF THE INVENTION

The purpose of the present invention is to design, build and operate a plasma reactor to synthesize ultra-fine SiC in a non-transferred arc plasma system using inexpensive reactants such as silica and methane. A new method and apparatus for producing pure, ultra-fine uniform sized ceramic carbides has been developed which comprises a non-transferred arc plasma torch as a heat source, a tubular reactor as a reaction chamber, and a quench chamber for rapidly quenching products to minimize their re-oxidation.

The process uses the high temperatures of the plasma torch to vaporize oxides and to make gaseous suboxides of SiO₂, B₂ O₃ and TiO₂ (such as silica, Boron oxide and Titanium oxide) and to thermally decompose methane (to form acetylene, carbon and hydrogen). The tubular reactor allows sufficient residence time (under the proper reaction conditions of temperature and partial pressures) for the formation of the ceramic carbides. The powders are collected, treated by roasting to remove excess carbon, and leached to remove excess metals and oxides. The product is pure, ultra-fine (0.2-0.4 micron) ceramic carbide.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of a plasma reactor system incorporating the reactor of the present invention.

FIG. 2 is a sectional view of an embodiment of the reactor according to the invention.

FIG. 3 is a graph of typical temperature profiles at the outlet end of the reaction chamber.

FIG. 4 is a graph of the average temperature profile in the reactor.

FIG. 5 is a size distribution bar chart of the silica powder used in the system.

FIG. 6 is a bar chart showing SiC yield as a function of the methane/silica molar ratio.

FIG. 7 is a photomicrograph of an SiC powder produced in the system shown in FIG. 1.

FIG. 8 is a bar chart of the particle size distribution of SiC powder.

FIG. 9 is a photograph of the plasma reactor system according to the invention.

FIG. 10 is a schematic of the model for the laminar flow reactor zone.

FIG. 11 is the free energy in kcal/mole versus temperature in kelvin for temperatures above 3000 degrees Kelvin.

FIG. 12 is the free energy in kcal/mole versus temperature in kelvin in the temperature range above 2000 degrees Kelvin but below 3000 degrees Kelvin.

FIG. 13 is the free energy in k/mole versus temperature in kelvin for temperatures below 2000 degrees Kelvin.

DESCRIPTION OF THE PREFERRED EMBODIMENT

Although for ease of understanding the following description is directed to producing pure silicon carbide from silica and methane. Other ceramic carbides can be readily produced by the present invention. Novel and unusual features of the present invention would include the use of silica and methane in a non-transferred arc to form pure, fine silicon carbide: the use of boric acid or boron oxide and methane to form fine, pure boron carbide; and the development of tubular, laminar flow reactors to allow the development of proper reaction conditions. Other features would include the formation of pure, fine tungsten carbide powders using tungstic acid or tungsten oxide and methane; formation of pure, fine titanium carbide powders using titanium oxide and methane; thermal decomposition of methane to form acetylene and carbon; formation of fine silicon monoxide powder using silica; formation of fine silicon powder; formation of fine boron powder; and destruction of hazardous waste.

Thermodynamic Analysis

In the proposed reaction mechanism scheme, for silicon carbide formation the reactor is divided into three zones. These zones are based on temperatures. The first zone 1 is the plasma jet or vaporization zone, where the temperature is considered to be above 3000° K. The second zone 3 is the reaction zone, where the temperature is between 2000° K. and 3000° K. The third zone 5 is the re-oxidation or quenching zone, where the temperature is less than 2000° K.

In the first zone 1, some of the reactions that are possible are given as follows:

    SiO.sub.2 (s)=SiO.sub.2 (g)                                (1)

    SiO.sub.2 (s)=SiO(g)+1/2O.sub.2 (g)                        (2)

    SiO.sub.2 (g)+C(s,g)=SiO(g)+CO(g)                          (3)

    SiO(g)+C=Si(g)+CO(g)                                       (4)

    SiO.sub.2 (g)+CO=SiO(g)+CO.sub.2 (g)                       (5)

    SiO.sub.2 +H.sub.2 =SiO(g)+H.sub.2 O                       (6)

    CH.sub.4 =C+2H.sub.2                                       (7)

    2CH.sub.4 =C.sub.2 H.sub.2 +3H.sub.2                       (8)

    2CH.sub.4 =C.sub.2 H+3.5H.sub.2                            (9)

    C(s)=C(g)                                                  (10)

    C(s)+1/2O.sub.2 =CO(g)                                     (11)

The free energies of formation of some of these reactions, in the temperature zone of T>3000° K., versus temperature are shown in FIG. 11. In this temperature zone most of the reactants are in a gaseous state. The main reactions in this temperature zone are the formation of SiO(g), Si(g), H₂ (g), C₂ H₂ (g), C₂ H(g), CO(g), and C(s,g).

For the reaction zone 2 where 2000° K.<T<3000° K., some of the possible reactions are given as:

    SiO(g)+C(s)=Si(g or l)+CO(g)                               (4)

    SiO(g+2C(s)=SiC(s)+CO(g)                                   (12)

    Si(g)+C(s)=SiC(s)                                          (13)

    SiO(g)+C.sub.2 H.sub.2 (g)=SiC(s)+H.sub.2 (g)+CO(g)        (14)

    SiO(g)+C.sub.2 H(g)=SiC(s)+0.5 H.sub.2 (g)+CO(g)           (15)

    Si(g)+C.sub.2 H(g)=SiC(s)+0.5 H.sub.2 (g)+C(s)             (16)

    2Si(g)+C.sub.2 H.sub.2 (g)=2SiC+H.sub.2 (g)                (17)

    2Si(g)+CO=SiC(s)+SiO(g)                                    (18)

    Si(g)+C.sub.2 H.sub.2 (g)=SiC(s)+C(s)+H.sub.2 (g)          (19)

In this temperature region, there is the strongest tendency of silicon carbide formation. The free energy diagram for some of the above reactions is shown in FIG. 12. The main reaction products in this region are SiC(s), CO(g), and H₂ (g).

In the quenching zone 5 where T<2000° K., the main reactions are given as follows::

    SiO(g,s)+CO(g)=SiO.sub.2 (s)+C                             (20)

    Si(l)+2CO(g)=SiO.sub.2 (s)+2C                              (21)

    2Si(l,s)+CO(g)=SiC+SiO                                     (18)

    SiC+2CO=SiO.sub.2 +3C                                      (22)

    2CO(g)=C(s)+CO.sub.2 (g)                                   (23)

    2SiO(s)=Si(s)+SiO.sub.2 (s)                                (24)

The free energy diagram for the above reactions is shown in FIG. 13. In this temperature region, both the thermodynamic and kinetic factors are unfavorable for significant formation of silicon carbide. This region can be considered a re-oxidation zone. If the quenching is sufficiently rapid (>10⁴ °k/sec) and the gaseous atmosphere remains reducing, the re-oxidation reactions do not happen to any appreciable extent.

Apparatus

Referring to the drawings, a schematic of the present invention for the synthesis of ultra-free silicon carbides is shown in FIG. 1. A photograph of the system is shown in FIG. 9. The central part of the system comprises a tubular, water cooled, stainless steel reactor 7 constructed of 316 stainless steel; the reactor 7 design accommodates the high temperatures associated with the plasma torch 17. Theoretical calculations (see page 14, lines 8-12) are used to determine the temperature and velocity properties expected in the reactor 7. Using a heat balance, the appropriate reactor diameter is estimated and the condensating rate control strategies of the particles present in the stream determined (the relationship between the internal diameter 57 of the reactor and the energy density at various power levels of the plasma torch 17 are taken into account). The time to complete the reaction is calculated using assumed kinetic equations. Having calculated the estimated reaction time, the length of the reaction chamber can be determined which will provide the reactants enough residence time in the reaction chamber to react (elutriation velocities for particles of different sizes were taken into account in determining the reactor 7 length).

A graphite tube 9 serves as the refractory lining of the reactor 7, protecting it from the high temperatures associated with the plasma torch. Because the graphite lining has high heat conductivity, to minimize heat loss it is necessary to insulate the graphite tube 9 with graphite felt 11, or zirconia felt but because of their low thermal conductivity and high refractoriness, several layers (5-6) of felt must be applied. The felt is placed between the graphite refractory 61 lining and the reactor inner wall 59.

At the periphery of the graphite felt are two one (1) foot water jackets, each jacket independent of the others having its own cooling circuits and lines, filter and thermocouples. At the discharge end of the reactor 13 is attached a collection chamber 15. The collection chamber 15 acts as a quenching chamber for the incoming gases, both by expansion and intensive water cooing. The chamber 15 resembles a rectangular box with a periphery water-cooled jacket. The collection chamber is constructed of 316 stainless steel. In the periphery water jackets and through a vertically disposed coolant baffle plate, water is circulated as a coolant. During operation, the incoming reactants encounter an intensively water-cooled quenching barrier which minimizes or prevents re-oxidization. In addition to the water jackets and the interior baffle plate, a copper cooling coil is provided oppositely disposed from the collection chamber entrance which provides further cooling to the incoming reactants. Once the gas stream passes the copper coil and exits the collection chamber, it has cooled to a temperature of approximately 150°-160° C. Teflon seals are provided on the cover to avoid any leakage from the collection chamber 5. The reactor 7 and the quenching section 15 are shown in FIG. 2.

A non-transferred arc plasma torch 17 (Model PT50 from Plasma Energy Corporation) provides the necessary heat for the reaction. The front electrode, connected to the negative terminal, serves as the cathode and the rear electrode, connected to the positive terminal, serves as the anode. Both electrodes are constructed of a copper chrome alloy and are intensively water cooled. A mixture of argon 19 and helium 21 is used as the plasma gas, the flow rates of the individual gases being adjusted and recorded separately. The torch is attached to a 96 KW D.C. power supply.

The plasma torch 17 is attached to the front portion 23 of the reactor 7 using a stainless steel coupling 25 in combination with an injection ring or other feeding arrangement which is used to feed the reactants; the connecting system is fabricated from 316 stainless steel. The stainless steel coupler serves to prevent leakage around the insertion area and permits easy removal of the plasma torch 17 for inspection or replacement. Insulating felt is used between the front portion 23 and the injection ring to minimize the heat losses from the front section.

Prior to reaching the reaction chamber, a Metco powder feeder 29 (Model 3MP) comprising a hopper for powder storage, an adjustable speed rotating wheel and a vibrating system to prevent clogging feeds the powders combined with the gas stream into the reactor through a copper tube. Using a graphite disc, reactants are radially fed into the reaction chamber 1 at three points. The reactants pass through the reactor, enter the collection chamber, are cooled, and subsequently exit the collection chamber; the exit gas temperature approximately 150°-160° C.

Because the exiting gas stream contains fine particles, it is necessary to pass the stream through a stainless steel tubular filter 31. Various filtering materials can be used but preferably 0.5 micron size "Nomex" cloth filter with a folded periphery filter bag. Maximum efficiency was obtained using filter bags with as large of surface area as possible.

After filtration, the off gases are passed over a burner 33 for further combustion. ensures full burning of the outgoing gases and converts the carbon monoxide present in the gases to carbon dioxide; the hazardous effects of the outgoing gases are minimized. The gases are then vented to a stack. Alternatively, the off gases can be recycled to increase the overall efficiency of the reactor, decrease production costs and reduce the hazardous effects of the off gases.

The reactor chamber includes multiple ports 37, 39, 41, 43 along the reactor 7 and the collection chamber. These ports are used to take samples of the gases and the solid species as they transition the reactor and collection chamber, and to monitor temperatures at various intervals in the reactor and the collection chamber; both "C" and "K" type thermocouples are used. (A two color pyrometer was used to measure the temperature of graphite lining (9) in the reaction zone. Temperatures in the first half of the reactor could not be measured by thermocouples because of the high temperatures associated with the plasma torch but could be estimated theoretically.)

Three sampling lines are mounted at different positions along the length of the reactor 7, each line comprising a 0.25 inch graphite tube inserted into the chamber, a microfilter, and a shut off valve. The lines are connected to a Varian gas chromatograph 45 (Model 3300) via a vacuum pump. The filter separates the solid species from the gaseous stream. The gas chromatograph removes the samples using a vacuum pump placed at the end of the sampling lines and has an air actuated auto-sampling valve which takes samples at specified times.

The information from the system, including temperature flow rate, is interfaced with a data acquisition system. The data system comprises an IBM personal computer (Model 30) coupled with a "Metrabyte" analog and digital conversion boards. The conversion board are connected to the thermocouple, flow sensors, pressure transducers and power supply parameters.

EXAMPLE

Commercial grade silica powder and technical grade (about 97% minimum purity) methane 28 are the primary reactants for the synthesis of ultra-fine silicon carbide in the plasma reactor. The silica powder size distribution is shown in FIG. 5 and primarily it comprises 6 to 40 micron particles. The methane 28 is combined with the silica powder at the powder feeder and used as the carrier gas along the powder feeder and to feed the powder into the reaction chamber. Alternatively, a mixture of methane and argon can be used as the carrier gas where argon is simply added to maintain a fixed flow rate of the carder gas. How rates for both gases are monitored using a mass flow meter and maintained at a delivery pressure for both gases of approximately 50 PSI. The silica powder is dried in an oven before each run to remove moisture and ensure proper feeding. Moisture in the system could disrupt the chemical balance of the system and induce clogging prior to the reactants entering the reaction chamber, thereby devoiding the system of all uniformity. The silica feed rate is maintained at about 5.0 g/min.

The plasma torch is operated using argon and helium as plasma gases filtered through a 15 micron filter. The plasma torch 17 is started with argon 19, but after about 10 minutes, helium 21 is added to enhance its power. Since helium has a higher ionization energy, the voltage across the electrodes is increased depending upon its flow rate and subsequently the power of the torch is increased. The argon and helium are maintained at a delivery pressure of 130 PSI at the source, however, due to many restrictions in the gas lines, the delivery pressure drops to 30 PSI at the torch. The flow rates for the argon and helium range between 3.5 to 4.0 SCFM (STP). The arc attachment is kept at the face of the cathode which provides a smooth arc for uniform erosion of the cathode. Operating parameters of the plasma torch for the first two sets of experiments are fixed and are given in Table 1.

                  TABLE 1                                                          ______________________________________                                         Voltage, V        165-185                                                      Current, A        175-190                                                      Power, KW         28.9-35.2                                                    Argon Flow, CFPM  3.5-4.0                                                      Helium Flow, CFPM 3.5-4.0                                                      Argon Pressure, PSI                                                                              130                                                          Helium Pressure, PSI                                                                             130                                                          Feed Pressure, PSI                                                                               28-30                                                        ______________________________________                                    

Table 1. Operating parameters of the plasma torch for the first two sets of experiments.

Temperatures are measured in the second section 3 of the reactor 7 using "C" type thermocouples. Example temperature profiles at the end of the reaction chamber versus time are given in FIG. 3. Curve "A" is the centerline temperature at the discharge end of the reactor, while curves "B" and "C" are the temperatures at the half radius 49 and the wall 9, respectively. As shown in the figure, the temperatures rise sharply in the beginning; this is a result of pre-heating the reactor without any reactants. After some minutes, the reactor attains a thermal equilibrium at which point the feed is started into the reactor; this is represented in FIG. 3 as a sudden drop in temperature.

As the temperatures could not be measured in the reactor, except near the discharge 13, a theoretical approach was adopted to estimate the average temperatures along the length of the reactor 7. On the basis of knowledge of the temperature gradient in the second half of the reactor 3, and of the temperatures and flow rates of the cooling water at the outlets 53, 55 in both of the sections 1, 3, and considering the reactor 7 to be at a steady state, an average temperature profile in the reactor 7 was determined, using an energy balance, as shown in FIG. 4.

For the first set of runs, the molar ratio of CH₄ :SiO₂ was changed from seven to one. Products in these runs varied in color from black to grey; the procedures using surplus methane produced a black powder because of the excess free carbon in the product. Products in these runs consisted of free carbon, silicon monoxide, silicon, silicon dioxide, and silicon carbide. Example results are shown in Table II, and a comparison chart for SiC recovery is shown in FIG. 6. Gas analysis for these runs show that the off gases consisted of H₂, CO, C₂ H₂, Ar, and He

                  TABLE II                                                         ______________________________________                                         Example Results                                                                Experiment                                                                              Powder,   CH.sub.4 SiO.sub.2                                                                       Free C, Recovery                                  No.      KW        m ratio   %       of SiC %                                  ______________________________________                                         T-4      30        7.0       45.0    25.0                                      T-27     31.5      5.0       38.5    46.7                                      T-24     31         4.25     35.0    54.0                                      T-21     35         4.25     33.0    62.8                                      SN-6*    30         4.25     41.0    77.2                                      T-44     29        4.0       36.0    55.0                                      T-32     31        3.0       10.6    53.5                                      T-33     31        2.0       **      45.7                                      T-45     30        1.0       **      18.5                                      ______________________________________                                          *Lower heat losses through the reactor walls                                   **Not measured                                                           

Recovery of silicon carbide ranged from 25% to 77.2%. As shown in the comparison chart (FIG. 6), the SiC recovery in a methane/silica molar ratio range of 3-4.25 remains almost identical. But it can be improved with an increase in power of the plasma torch 17 (T-21). Silicon carbide recovery can also be increased by avoiding the re-oxidation of SiC by CO at the discharge end 13 of the reactor 7. (SN-6)

Alternatively, the above examples are followed except for the following substitutions: silica only; silica and C; silica and CO; silica, C and CO; silica and acetylene; silica, C and acetylene; methane only; and acetylene only. The purpose was to understand and confirm the reaction mechanism of the carbonization reaction.

PRODUCT ANALYSIS

The powders produced are analyzed by chemical and physical characterization. Chemical quantitative analysis is performed for all the species present in the product. Physical characterization includes size, morphology, and size distribution of the powder.

Chemical Characterization

Qualitative analysis of the powder produced is performed by x-ray diffraction at two stages: first, it is analyzed in the as-produced form, and second, it is analyzed after chemical treatment. Chemical treatment consists of roasting the powders in air followed by leaching with HF acid and then a mixture of HF and HNO₃ acids. The as-produced powder shows free carbon, silicon, silicon monoxide, silicon dioxide, and beta-silicon carbide. The chemically treated powder only shows beta-silicon carbide.

Free Carbon

Free carbon in the sample is determined by oxidizing the sample in a tube furnace at a temperature of 650° C. The sample is placed in a ceramic boat in the furnace. A pre-adjusted air stream is passed through the tube. All free carbon present in the sample is oxidized to CO₂ (using copper oxide wire in air). Carbon dioxide present in the outgoing gas stream is trapped by Ba(OH)₂ solution which converts the CO₂ to BaCO₃. The remaining solution is titrated with HCl and the absorbed quantity of CO₂ is determined.

Free Silicon and Silica

If free silicon is in amorphous form, it will be dissolved in hydrofluoric acid. If the silicon is in metallic form, it will not be dissolved in HF, but it can be dissolved in a mixture of 1HF+3NHO₃. Silicon monoxide is also soluble in HF+HNO₃ solution. Silica is soluble in HF acid.

Samples are analyzed in two ways. First, a sample is roasted in the tube furnace to determine the free carbon and then it is treated with hydrofluoric acid and a mixture of hydrofluoric and nitric acids. The residue is pure silicon carbide. The solution after dissolution is analyzed for silicon content by atomic absorption (for the complete mass balance). A similar sample from the same experiment is analyzed in a reverse way. That is, the treatment with the acids comes first and then roasting is performed in the tube furnace.

Physical Characterization

Powders produced from each experiment are studied for particle size and morphology using a scanning electron microscope. A photomicrograph of an SiC product sample is shown in FIG. 7. Most of the particles in the micrograph are 0.2-0.4 microns in size.

Particle Size Distribution

Particle size distribution is also very important in the subsequent treatment of the powder. Coulter counter and Horiba particle analyzers are used to study the particle size distribution in this work. The size distribution of the silicon carbide powder from T-31 is shown in FIG. 8. It mainly consists of particles ranging in size from 0.2 to 0.4 micron.

REACTION MECHANISMS

Based upon the experimental results and the thermodynamic analysis, the following reaction mechanisms are proposed:

Vaporization Zone

(1) The silica vaporizes to form SiO(g) and O(g). This was confirmed by feeding silica only.

(2) The methane cracks to form primarily H₂ (g), C₂ H₂ (g), C₂ H(g), PRT and C(s). This was confirmed by feeding methane only.

(3) The O(g) reacts with C(s) to form CO(g).

Reaction Zone

(1) The SiO(g) and Si(g) react with C₂ H₂ (g) and C₂ H(g) to form SiC(s). These are gas-gas reactions and require the formation of critical nuclei.

(2) Reactions (1) happen at SiC(s) and C(s) sites.

(3) SiO(g) and Si(g) react with C(s) to form SiC(s). As these are gas-solid reactions, they depend upon the C(s) surface area which is quickly diminished by a coating of SiC. The yield of silicon carbide could be increased by extending this reaction zone.

Quenching Zone

(1) If the quenching is fast enough and the atmosphere is strongly reducing, then no back reactions are possible. Some back reaction was observed experimentally but could be eliminated by faster quenching.

REACTOR MODEL

Models for the heat transfer and fluid flow in the reactor 7 have been developed and evaluated experimentally. The models assume steady state behavior and neglect the flame zone except as a heat and vaporization source.

Heat Transfer Model

A schematic of the model for the laminar flow reactor zone is presented in FIG. An energy balance equation in dimensionless form is:

    dθ/dη=λ.sub.1 [θ-θ.sub.w)+λ.sub.2 (θ.sup.4 -θ.sup.4)]+λ.sub.3 [(θ-θ.sub.SiO2)+λ.sub.4 (θ.sup.4 -θ.sub.SiO2.sup.4)]+λ.sub.5

    θ(η=0)=1

Dimensionless Groups ##EQU1##

Heat convected and radiated to the walls 51 of the reactor is equal to the heat taken away through the walls 51 by cooling water. In dimensionless form it can be represented as follows: ##EQU2## Mass Transfer Model

It is assumed that the SiO(g) reacts with C₂ H₂ (g) to form SiC. In this case the concentration of SiO(g) and temperature act as the driving force for the reaction, assuming C₂ H₂ is in abundance. In the following, a mass transfer equation for SiO concentration is presented in dimensionless form:

    dX.sub.SiO /d.sub.η =-[λ.sub.6 (e.sup.-λ7/θ)X.sub.SiO ]/θ

    X.sub.SiO (η=0)=X.sub.SiO.sup.0

Dimensionless Groups

    η.sub.8RT =Z/L λ.sub.6 =πR.sub.PRT.sup.2 Pk.sub.o L/MRT.sub.o λ.sub.7 =E.sub.A /RT.sub.o

These two models are coupled and solved numerically. The model is the subject of the paper "Fundamentals of Silicon Carbide Synthesis in a Thermal Plasma," by P. R. Taylor and S. A. Pirzada. More detailed models, including heterogeneous kinetics and nucleation and growth kinetics, are the subject of further investigation.

CONSOLIDATION AND CHARACTERIZATION

The powders that are being produced are suitable for ceramic application by consolidation and sintering. Carbide powders produced pursuant to the present invention can be employed in applications where prior silicon carbide powders, including abrasives, have been used.

NOMENCLATURE

T_(o) average inlet gas temperature (°K.)

T_(w) wall temperature (°K.)

T_(Si) particle temperature (i=1 heat up; i=2 m.p; i=3 b.p.) (°K.)

T_(wat) cooling water temperature (°K.)

Q average gas flow rate (m₃ /hr)

C_(P) average gas heat capacity [kJ/(kg.°K.)]

ρ average gas density (kg/m³)

R reactor radius (m)

L reactor length (m)

r_(o) average solid particle radius (m)

h_(w) heat transfer coefficient to wall [kJ/(hr.mt².°K.)]

h_(p) heat transfer coefficient to particle (")

h_(eff) effective heat transfer coefficient (")

ε voidage

ε_(w) emissivity of wall

ε_(p) emissivity of particle

σ Boltzman coefficient [kJ/(hr-m² °K.⁴)]

.increment.H_(i) particle enthalpy (i=1 H_(m), i=1 H_(v), i=3 H_(reaction)) (kJ/mole)

r_(i) rate (i=1 heat up, i=2 melting, i=3 vaporization) (mole/hr)

X_(SiO) mole fraction SiO

P pressure (kg/m²)

E_(A) activation energy (kJ/mole) 

What is claimed is:
 1. An apparatus for producing relatively uniform sized ultrafine pure ceramic carbides comprising:(a) a plasma torch for heat treating materials, said plasma torch producing a plume hot enough to vaporize particulate feed and disassociate gases included in said materials; (b) a reactor chamber for receiving said plasma torch plume and for receiving and heat treating materials to be heat treated, said reactor chamber having a plurality of separate reactor chamber zones and means for independently controlling temperatures in said plurality of separate reactor chamber zones, the temperatures of said plurality of separate reactor chamber zones decreasing from a first reactor temperature zone including the plasma torch to a final reactor temperature zone including a collector; and (c) a collection chamber including a heat exchanger, said heat exchanger at least partially disposed in the interior of the collection chamber, for rapid cooling of said materials heat treated by said reactor chamber by heat exchange with a circulating fluid passing through said heat exchange to prevent re-oxidation of said materials and for collecting said materials, said collection chamber removing sufficient thermal energy from said gases and solids to prevent re-oxidation.
 2. Apparatus according to claim 1 wherein said reactor comprises first, second and third temperature zones, said first temperature zone being a plasma jet or vaporization zone at a temperature above 3000° kelvin, said second temperature zone being a reaction zone at a temperature between 2000° and 3000° kelvin, and said third temperature zone being a re-oxidization or quenching zone at a temperature below 2000° kelvin.
 3. Apparatus according to claim 1, wherein said reactor chamber zones comprise a first, a second, and a third temperature zone, and wherein said first temperature zone is maintained at a temperature sufficient to ensure that most of said reaction products in said first temperature zone are in a gaseous state, said second temperature zone is maintained at a temperature sufficient to ensure that most of the ceramic carbides are formed in said second temperature zone, and said third temperature zone is maintained at a temperature sufficient to ensure that said third temperature zone serves as a re-oxidation or quenching zone.
 4. Apparatus according to claim 1, wherein said reactor is constructed of stainless steel and further comprises:(a) a graphite tube constituting a refractory lining of said reactor; (b) graphite felt and zirconia surrounding said graphite tube to provide insulation and support; and (c) a water cooling jacket surrounding said graphite tube and said graphite felt to cool said plasma torch, said reactor chamber, and said reaction products.
 5. The apparatus according to claim 4 wherein said plasma torch includes water cooled electrodes comprising copper chrome alloy.
 6. Apparatus according to claim 1 wherein said plasma torch for providing heat is a non-transferred arc plasma torch.
 7. In an apparatus having a plasma torch for heating materials selected to produce a desired reaction product, to a temperature sufficient to initiate a reaction, and a reaction chamber for providing a reaction zone in which the materials are heated by the plasma torch, a collection chamber being disposed at an end of said reaction chamber, wherein said collection chamber is made of stainless steel and is intensely fluid cooled, the improvement comprising:a fluid cooled cooling means surrounding said collection chamber and at least partially disposed in an interior of said collection chamber for removing sufficient thermal energy from the materials to prevent re-oxidation of the reaction product.
 8. Apparatus according to claim 7, wherein a mixture of argon and helium is used as plasma gas for said plasma torch, said plasma torch being attached to a power supply, and said plasma torch being attached to the front of the reactor by means of a stainless steel coupling.
 9. Apparatus according to claim 7, wherein a stainless steel injection ring, or a graphite ring and felt insulation coupled with said plasma torch, is used to feed reactants into said reactor.
 10. Apparatus according to claim 7, wherein reactants are fed into said reactor radially through a graphite disk using a feeder system comprising a hopper for powder storage, an adjustable speed rotating wheel for mixing, and a vibrating system for continuous flow.
 11. Apparatus according to claim 7 comprising a filter attached to said collection chamber for filtering gases and reactant particles.
 12. An apparatus for producing relatively uniform sized ultra-fine pure ceramic carbides comprising:(a) a plasma torch for heat treating materials, said plasma torch producing a plume hot enough to vaporize particulate feed and disassociate gases included in said (b) a reactor chamber for receiving said plasma torch plasma torch plume and for receiving and heat treating materials to be heat treated, said reactor chamber having a plurality of separate reactor chamber zones, multiple ports along said plurality of separate reactor chamber zones for taking samples of said particulate feed and said gases, and means for independently controlling temperatures in said plurality of separate reactor chamber zones, the temperatures of said plurality of separate reactor chamber zones decreasing from a first reactor temperature zone including the plasma torch to a final reactor temperature zone including a collector; and (c) a collection chamber including a heat exchanger, said heat exchanger at least partially disposed in the interior of the collection chamber, for rapid cooling of said materials heat treated by said reactor chamber by heat exchange with a circulating fluid passing through said heat exchanger to prevent re-oxidation of said materials and for collecting said materials, said collection chamber removing sufficient thermal energy from said gases and solids to prevent re-oxidation.
 13. The apparatus of claim 12, further comprising a filter disposed in sampling lines coupled to said ports, a gas chromatograph, and at least one sensor, and wherein said means for withdrawing comprise a vacuum pump to extract the gas from said reaction chamber through said sampling lines.
 14. Apparatus according to claim 13, wherein said gas chromatograph and said at least one sensor are connected to a computer through a conversion board.
 15. Apparatus according to claim 12, wherein powder is fed to said reaction chamber using methane, argon or methane and argon gas.
 16. Apparatus according to claim 12, where silica powders comprising 6 to 40 micron particles and methane are primary reactants, said methane being fed at a delivery pressure of approximately 50 PSI.
 17. The apparatus of claim 12, wherein argon and helium are primary gases for operation of said plasma torch. 